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Maintenance & RepairChiller Repair / Maintenance / Sales
We provide professional chiller repair, preventive maintenance, and sales services for major brands, including AMAT, SMC, DAIKIN, NESLAB, TEL, and more. With years of semiconductor-industry service experience, we offer fast troubleshooting, a high repair success rate, and loaner replacement units/parts to minimize tool downtime.
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Main EquipmentE-beam Inspection System
The TORAY NGR3500 series is a next-generation e-beam inspection system developed for advanced semiconductor process nodes (5nm / 3nm / below). Featuring high resolution, high sensitivity, and high-speed scanning capabilities, it effectively detects minute defects after lithography, etching, and deposition, enhancing process quality control and overall manufacturing yield.
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Ancillary EquipmentExtreme Efficiency Chiller (EEC)
The Extreme Efficiency Chiller (EEC) is specifically engineered for semiconductor equipment and precision manufacturing processes. Featuring a modular design and high-efficiency temperature control mechanism, the EEC rapidly achieves target temperatures with exceptional stability. This system effectively minimizes process variations and significantly enhances production yield.
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Main Equipment
Optical Inspection System
OLYMPUS – AL3100/3300
A well-known optical inspection tool from Japan, backed by extensive technology development experience and strong after-sales support, delivering advanced wafer inspection capabilities to meet your cutting-edge requirements.
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Maintenance & RepairPCB / Controller Repair & Sales
- Repair and refurbishment of control PCBs, HMI/screens, and communication faults
- Software upgrades / firmware updates
- Supply of used controllers with on-site functional testing
- Supported Brands：SMC, NIKON, NOAH, DAIKIN
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Components & ConsumablesPolyimide Gasket
Electrical Insulation Gasket
A dedicated gasket for semiconductor dry etchers, designed as an electrically insulating sealing gasket.
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Components & ConsumablesRetainer Ring
A retaining ring is a critical component used in CMP (Chemical Mechanical Planarization) tools. It is installed around the outer perimeter of the wafer carrier and plays an essential role during the polishing process.
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Components & Consumables
Sapphire Products
High-purity sapphire (Al₂O₃) is an ideal high-hardness material for harsh environments in high-tech industries such as semiconductors, LED, IC packaging, and TFT. By adopting an advanced KY process, we provide customers with precision machining, single-crystal fabrication, and cost-effective sapphire solutions—making us your trusted partner for sapphire components.
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Components & ConsumablesSynthetic Polycrystalline Quartz
Synthetic Polycrystalline Quartz (SPQ) – E-Chuck Protection Component is a man-made, high-purity quartz material widely used in high-end applications such as semiconductor processes, optical components, and chemical equipment. This product is designed as a clean, contamination-free protective part for the wafer electrostatic chuck (Wafer E-Chuck / ESC) in dry etching equipment.
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