Synthetic Polycrystalline Quartz

Purpose & Applications

This product is a quartz protective component designed specifically for semiconductor dry etchers. Made of high-purity Synthetic Polycrystalline Quartz (SPQ), it effectively shields the electrostatic chuck (ESC / E-Chuck) from high-energy ion bombardment during plasma etching, preventing direct damage to the expensive chuck assembly.
With ultra-low particle generation and excellent chemical stability, it helps minimize contamination inside the process chamber and is one of the key components for maintaining process cleanliness and stability.

What is Synthetic Polycrystalline Quartz (SPQ)?

Synthetic Polycrystalline Quartz is an artificially manufactured quartz material formed by aggregating numerous micro-sized quartz grains. Compared with natural single-crystal quartz, SPQ features a more uniform structure, excellent thermal stability, and strong mechanical properties, making it ideal for demanding environments.

Key material characteristics

• High purity: ultra-low impurities, up to 99.999% (5N) purity, suitable for critical semiconductor/optoelectronic processes
• Isotropic structure: reduced thermal stress and improved crack resistance for high-temperature/thermal cycling environments
• Low coefficient of thermal expansion: excellent dimensional stability for precision processes
• Excellent chemical resistance: withstands strong acids and plasma environments

Key Features & Advantages

• High-purity material: made from synthetic high-purity SPQ with minimal risk of metal contamination
• Superior plasma resistance: effectively withstands high-energy ion bombardment in plasma processes
• High thermal stability: suitable for high-temperature etching; extremely low thermal expansion
• Low particle generation: smooth surface helps reduce micro-particle generation and supports chamber cleanliness
• High mechanical strength: stable for long-term use, less prone to breakage
• Easy replacement: cost-effective; modular design for quick replacement and maintenance

Compatible Tools & Process Types

• Suitable for mainstream dry etching equipment
• Compatible with tools from Applied Materials, Lam Research, Tokyo Electron (TEL), Oxford Instruments, etc.
• Used for E-Chuck (ESC) protection beneath the wafer during etching processes

Performance Benefits

• Extends E-Chuck service life and reduces tool maintenance frequency
• Maintains ultra-high chamber cleanliness and stable process performance
• Reduces risk of metal contamination and mechanical wear caused by ion bombardment
• Minimizes line excursions and yield-loss risks

Recommended Fors

•  Chip manufacturing processes requiring high yield
• Critical etch steps for advanced nodes (5nm / 3nm)
• IDMs / Foundries with strict requirements on tool stability

Brand Introduction – BC&C (BCnC)

BC&C is a listed manufacturing company located in Gwangju, Gyeonggi-do, South Korea, established in 2003, specializing in the production and supply of semiconductor equipment parts. Its main products include silicon electrodes, silicon rings, and showerheads for etch tools, which are widely used in wafer etching processes and play a key role in improving process precision and equipment stability.
BC&C also actively expands into international markets through collaborations with multiple semiconductor equipment manufacturers, increasing global recognition and market presence.
BCnC Korea Edge Rings, Tubes, etc. are widely used on tools from Lam, TEL, AMAT, Hitachi, Mattson, and more.