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Main EquipmentE-beam Inspection System
The TORAY NGR3500 series is a next-generation e-beam inspection system developed for advanced semiconductor process nodes (5nm / 3nm / below). Featuring high resolution, high sensitivity, and high-speed scanning capabilities, it effectively detects minute defects after lithography, etching, and deposition, enhancing process quality control and overall manufacturing yield.
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Main Equipment
Optical Inspection System
OLYMPUS – AL3100/3300
A well-known optical inspection tool from Japan, backed by extensive technology development experience and strong after-sales support, delivering advanced wafer inspection capabilities to meet your cutting-edge requirements.
