{"id":1705,"date":"2025-01-08T11:45:32","date_gmt":"2025-01-08T03:45:32","guid":{"rendered":"https:\/\/profab.com.tw\/product\/e-beam-inspection-system\/"},"modified":"2026-01-21T15:58:31","modified_gmt":"2026-01-21T07:58:31","slug":"e-beam-inspection-system","status":"publish","type":"product","link":"https:\/\/profab.com.tw\/en\/product\/e-beam-inspection-system\/","title":{"rendered":"E-beam Inspection System"},"content":{"rendered":"<h5><strong>Key Features\u00a0<\/strong><\/h5>\n<ul>\n<li>High-resolution electron-beam technology with a minimum detectable defect size down to 1 nm.<\/li>\n<li>Fast, large-area scanning to improve inspection throughput.<\/li>\n<li>Supports inline inspection requirements.<\/li>\n<li>AI-based defect classification to enhance review efficiency and consistency.<\/li>\n<li>Supports automated operation and SECS\/GEM communication for factory integration.<\/li>\n<\/ul>\n<h5><strong>Applications\u00a0<\/strong><\/h5>\n<ul>\n<li>Wafer defect inspection and analysis<\/li>\n<li>Wafer process anomaly monitoring<\/li>\n<li>Photomask and pattern transfer quality control<\/li>\n<li>Yield analysis for advanced processes (e.g., EUV, 3D IC, etc.)<\/li>\n<\/ul>\n<h5><strong>About TORAY (Toray Engineering)<\/strong><\/h5>\n<p>Toray Engineering Co., Ltd. was established in 1960, initially providing plant construction and production equipment maintenance for Toray Industries, Inc. As a member of the Toray Group, Toray Engineering has 11 subsidiaries in Japan and overseas, and is currently engaged in three major business areas: Engineering, Electronics, and Environment &amp; Energy.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>The TORAY NGR3500 series is a next-generation e-beam inspection system developed for advanced semiconductor process nodes (5nm \/ 3nm \/ below). Featuring high resolution, high sensitivity, and high-speed scanning capabilities, it effectively detects minute defects after lithography, etching, and deposition, enhancing process quality control and overall manufacturing yield.<\/p>\n","protected":false},"featured_media":1149,"template":"","meta":{"_uag_custom_page_level_css":"","site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[71],"product_tag":[],"class_list":{"0":"post-1705","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-equipment","7":"desktop-align-left","8":"tablet-align-left","9":"mobile-align-left","10":"ast-product-gallery-layout-horizontal-slider","11":"ast-product-gallery-with-no-image","12":"ast-magnify-disabled","13":"ast-product-tabs-layout-horizontal","15":"first","16":"instock","17":"shipping-taxable","18":"product-type-simple"},"uagb_featured_image_src":{"full":["https:\/\/profab.com.tw\/wp-content\/uploads\/\u7522\u54c1_NGR3500.jpg",712,534,false],"thumbnail":["https:\/\/profab.com.tw\/wp-content\/uploads\/\u7522\u54c1_NGR3500.jpg",128,96,false],"medium":["https:\/\/profab.com.tw\/wp-content\/uploads\/\u7522\u54c1_NGR3500.jpg",712,534,false],"medium_large":["https:\/\/profab.com.tw\/wp-content\/uploads\/\u7522\u54c1_NGR3500.jpg",712,534,false],"large":["https:\/\/profab.com.tw\/wp-content\/uploads\/\u7522\u54c1_NGR3500.jpg",712,534,false],"1536x1536":["https:\/\/profab.com.tw\/wp-content\/uploads\/\u7522\u54c1_NGR3500.jpg",712,534,false],"2048x2048":["https:\/\/profab.com.tw\/wp-content\/uploads\/\u7522\u54c1_NGR3500.jpg",712,534,false],"woocommerce_thumbnail":["https:\/\/profab.com.tw\/wp-content\/uploads\/\u7522\u54c1_NGR3500.jpg",712,534,false],"woocommerce_single":["https:\/\/profab.com.tw\/wp-content\/uploads\/\u7522\u54c1_NGR3500.jpg",712,534,false],"woocommerce_gallery_thumbnail":["https:\/\/profab.com.tw\/wp-content\/uploads\/\u7522\u54c1_NGR3500-100x100.jpg",100,100,true]},"uagb_author_info":{"display_name":"admin","author_link":"https:\/\/profab.com.tw\/en\/author\/"},"uagb_comment_info":0,"uagb_excerpt":"The TORAY NGR3500 series is a next-generation e-beam inspection system developed for advanced semiconductor process nodes (5nm \/ 3nm \/ below). 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