{"id":1702,"date":"2025-01-15T11:48:04","date_gmt":"2025-01-15T03:48:04","guid":{"rendered":"https:\/\/profab.com.tw\/product\/gasket\/"},"modified":"2026-01-22T09:32:46","modified_gmt":"2026-01-22T01:32:46","slug":"gasket","status":"publish","type":"product","link":"https:\/\/profab.com.tw\/en\/product\/gasket\/","title":{"rendered":"Polyimide Gasket"},"content":{"rendered":"<p>This product is specifically designed for electrical isolation and sealing in the process chamber of semiconductor dry etching equipment.<\/p>\n<h5><strong>Its main functions include<\/strong><\/h5>\n<ul>\n<li>Maintaining electrical uniformity and stability inside the process chamber<\/li>\n<li>Preventing electrical anomalies or process defects caused by ion\/plasma interference<\/li>\n<li>Providing airtight sealing to prevent gas leakage<\/li>\n<li>Withstanding high temperature and corrosive process gases to ensure long-term stable operation<\/li>\n<\/ul>\n<h5><strong>Applicable For<\/strong><\/h5>\n<ul>\n<li>Dry etching equipment<\/li>\n<li>Critical etching steps in semiconductor wafer processes<\/li>\n<li>Maintaining high-precision lithography\/etch pattern fidelity<\/li>\n<\/ul>\n<h5><strong>Key Features &amp; Advantages<\/strong><\/h5>\n<ul>\n<li>High insulation performance \u2013 helps prevent process abnormalities caused by plasma discharge or electrical leakage<\/li>\n<li>Excellent heat resistance \u2013 suitable for high-temperature etching environments<\/li>\n<li>Chemical corrosion resistance \u2013 compatible with common etch gases such as CF\u2084, SF\u2086, and Cl\u2082<\/li>\n<li>Excellent airtightness \u2013 effectively seals process gases inside the chamber and reduces leakage risk<\/li>\n<li>Customizable size and shape \u2013 can be designed according to tool configuration and application requirements<\/li>\n<\/ul>\n\n<table id=\"tablepress-3\" class=\"tablepress tablepress-id-3 zebra-striping tablePress-align-left tablePress-w80\">\n<thead>\n<tr class=\"row-1\">\n\t<th colspan=\"2\" class=\"column-1\">\u578b\u865f MODEL<\/th>\n<\/tr>\n<\/thead>\n<tbody class=\"row-striping row-hover\">\n<tr class=\"row-2\">\n\t<td class=\"column-1\">GK-L-027108<\/td><td class=\"column-2\">Chock Ring<\/td>\n<\/tr>\n<tr class=\"row-3\">\n\t<td class=\"column-1\">GK-L-066269<\/td><td class=\"column-2\">FTG, RING, GAST GUARD, ABE<\/td>\n<\/tr>\n<tr class=\"row-4\">\n\t<td class=\"column-1\">GK-L-073710<\/td><td class=\"column-2\">OTHER, Talon Cirlex shim set<\/td>\n<\/tr>\n<tr class=\"row-5\">\n\t<td class=\"column-1\">GK-L-078253<\/td><td class=\"column-2\">TER Gel Gasket Set-FL<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<!-- #tablepress-3 from cache -->\n","protected":false},"excerpt":{"rendered":"<p>Electrical Insulation Gasket<\/p>\n<p>A dedicated gasket for semiconductor dry etchers, designed as an electrically insulating sealing gasket.<\/p>\n","protected":false},"featured_media":1428,"template":"","meta":{"_uag_custom_page_level_css":"","site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center 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Insulation Gasket A dedicated gasket for semiconductor dry etchers, designed as an electrically insulating sealing gasket.","_links":{"self":[{"href":"https:\/\/profab.com.tw\/en\/wp-json\/wp\/v2\/product\/1702","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/profab.com.tw\/en\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/profab.com.tw\/en\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/profab.com.tw\/en\/wp-json\/wp\/v2\/media\/1428"}],"wp:attachment":[{"href":"https:\/\/profab.com.tw\/en\/wp-json\/wp\/v2\/media?parent=1702"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/profab.com.tw\/en\/wp-json\/wp\/v2\/product_brand?post=1702"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/profab.com.tw\/en\/wp-json\/wp\/v2\/product_cat?post=1702"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/profab.com.tw\/en\/wp-json\/wp\/v2\/product_tag?post=1702"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}