Main Products & Services
- Micro and large precision optical components
- Sapphire windows, wafers, and plates
- Sapphire tubes, rods, balls, and custom shapes
- Sapphire windows for high-pressure, vacuum, and observation applications
Material Properties of Our Sapphire
- High hardness with excellent scratch and corrosion resistance
- Optical-grade transmission enabled by controlled crystal growth/orientation processes (including UV, visible, and IR)
- High temperature and high pressure resistance
- A stable high dielectric constant electrical insulation material that can be fabricated into various shapes and structures
Applications (Process Compatibility)
- HPD CVD
- PECVD
- Dry Etch
- Wet Etch
Typical Sapphire Components
- Plasma containment tubes
- >330mm large components
- Viewports
- End effectors
- Lift pins
- Edgerings
- Showerheads
PROFAB Advantages & Machining Capabilities
- Precision polishing tailored to customer requirements
- Stable and reliable lead time
- Surface treatments available for different applications, such as coating and anti-reflection (AR) processing
Application Fields
- Semiconductor process components
- High-power lasers and infrared optical systems
- LED manufacturing equipment
- Vacuum chamber windows