| | AW™ Series C-SAM® | | The AW™ Series are advanced high-capacity, high throughput automated wafer C-SAM® instruments specialized to deliver maximum sensitivity for the evaluation of wafer and device level applications. The AW series can deliver better than 5 micron sensitivity, throughputs that are approximately two times faster than competitive systems and non‑immersion scanners that eliminate false positives due to DI water ingression. The AW Series automatically handles, inspects and sorts wafers based on user-defined accept/reject criteria.
Features
- Sonoscan’s Waterfall™ transducer provides non-immersion scanning which minimizes the risk of contamination and false bond indications
- Dual loadports (optional) for larger batch capacity with loadports for 300mm FOUP or FSOB carriers, for 200mm SMIFs and for 100mm to 200mm cassettes are available
- Sonoscan’s automated analysis software accurately determines percentage of bond and/or non-bonded, void size and count, open cavity seals and minimum seal width as well as an automatic accept/suspect/reject based on user defined criteria
- 500 MHz bandwidth pulser/receiver and ultra-high resolution transducers are designed and manufactured by Sonoscan for optimum performance and to generate superior images
- Class 1000 clean room rated and Class 100 clean room rated are available
|
|